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attoAFM III
in-situ SEM AFM with tuning fork sensor
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Similar to the attoAFM I, the in-situ SEM attoAFM III is an offshoot of attocube's successful low temperature atomic force microscope series. With a decade of experience in scanning probe microscopy, attocube systems has succeeded in equipping the attoAFM III with all virtues important for a successful operation inside of an electron microscope. Thanks to its ultra-slim design, the tuning fork-based attoAFM III can be easily integrated into virtually any electron microscope currently available on the market.
Once mounted inside the SEM via a custom made adapter plate, the zero-tilt design of the attoAFM III allows full visual access onto sample and tip. With the ANPxy51/ANPz51 coarse positioning stages aligned parallel to the sample positioning axes of the SEM, sample positioning and coarse approach is a delight. The simple but powerful design of the attoAFM III has proven very successful in various applications, such as e.g. for the in-situ investigation of undeveloped e-beam resist.
The attoAFM can be equipped with attocube's encoded ANP101-series positioners, allowing closed loop coarse positioning of tip and sample.
Customized
attoAFM III with full visible access to the tip and sample.
| Microscope
Setup |
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AFM sensor unit
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ultra stable AFM module |
| detection mode |
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interferometric deflection detection
tuning fork shear force detection (non-contact mode) |
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| Operation Modes |
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feedback |
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PI feedback loop
with additional PLL |
imaging modes |
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contact mode,
non-contact mode |
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| Operating Conditions |
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operating temperature |
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300 K |
max. bake out temperature |
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150 °C |
operating pressure range |
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1E-9 mbar ..
1 bar |
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| Sample Positioning |
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positioners and
scanners |
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coarse positioners
ANPxy51/ANPz51 with piezo scanner ANSxy50/ANSz50 |
coarse range |
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3 x 3 x 2.5 mm³ |
step size |
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0.025 .. 1.5 µm
@ 300 K |
fine scan range
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30 x 30 µm² @
300 K |
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| Probe Design |
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etched metal wires, Akiyama Probe |
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| Noise |
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| z bit resolution |
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16.4 pm |
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| Scan Controller and Software |
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| ASC500 SPM controller |
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for detailed specifications please
see ASC500 section |
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Available
Controller for this Product: |
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FPGA-based, fully digital SPM controller
with xy-scan generator incl. feedback control und phase locked loop (PLL) |
| ANC350 |
Piezo positioning controller
for attocube's encoded positioners |
| ANC300 |
Piezo positioning controller
for attocube's open-loop positioners |
Request Quotation & Support : |
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| Product
Key Features
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ultra
compact, rugged AFM |
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highly-sensitive, ultra-low footprint tuning fork sensor |
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no adjustment necessary, nooptical fiber vacuum feedthrough |
| Benefits
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plug-and-play compatibility with virtually all SEMs |
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atomic resolution topography (in z), extremely reliable and easy to use |
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mounted directly onto SEM translation stage using adapter plate |
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complementary topographic information even for samples with week material contrast |
Figure 1: Tuning fork AFM images of SrTiO3 showing atomically resolved steps. In a), recorded inside the SEM, the surface is partially covered with carbon atoms. In contrast, b) was recorded in UHV conditions and shows a perfectly clean surface (Group of Prof. Reiss, University of Bielefeld, Germany & attocube application labs, 2009). |
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